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      1. 歡迎訪問蘇州迪森特智能科技有限公司!
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        超低溫工作臺移動檢測-capa

        時間:2017-02-27      來源:蘇州迪森特      關鍵詞:蘇州迪森特      瀏覽量:952


        納米級別的原子顯微鏡可以用來檢測各種表面。被測物體必須以納米級別幅度移動以得到表面圖像。由一家德國公司開發的超低溫檢測系統使用了一種特殊的驅動電機,實現了這樣的位移。

        平臺的移動依靠電容傳感器進行測量。整個顯微鏡頭由液氦冷卻到4K,整個移動部件需要在超低溫,真空以及強磁場作用下工作。米銥公司為該應用提供了兩支電容傳感器,成功滿足了極端

        環境工作要求。

        Surfaces  are  inspected  with  nanometre  resolution for Atomic Force Microscopy (AFM). The test item must be able to be moved in the nanometre range for a surface
        topography. attocube systems AG in Munich has developed actuator motors for such precise positioning. Using a positioning unit with piezo ceramics, movement in the x,
        y and z-axes is possible. The positioning range, which is measured by the sensors, is 1.2mm x 1.2mm. The complete microscope head is cooled with liquid helium to 4K
        above the absolute zero point of -273°C (corresponds to 0K). The traversing units operate at 4K ambient temperature in an ultra-high vacuum and under the highest

        magnetic fields.
        In order to measure the x and y movement, attocube systems AG uses two capacitive sensors from Micro-Epsilon on the nano positioning unit. With a measuring range of
        1mm, the sensors have a precision of less than 5nm and operate completely without contact. The extreme ambient conditions are a particular challenge. The sensors must provide  identical  results  at  4K  as  at  room  temperature. This is possible due to the use of special materials for the sensor  and  cable,  which  provide stable  measurements due to low thermal expansion. The sensors are not influenced  by  extreme  ambient  conditions.  This  application can only be solved using capacitive measurement technology.  No  precise  statements  about  the  measurement results were possible using eddy current sensors, as the temperature gradient of the target at 4K is very low and the specific current flow characteristics change.

        應用詳情,請點擊下載

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