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納米級別的原子顯微鏡可以用來檢測各種表面。被測物體必須以納米級別幅度移動以得到表面圖像。由一家德國公司開發的超低溫檢測系統使用了一種特殊的驅動電機，實現了這樣的位移。
平臺的移動依靠電容傳感器進行測量。整個顯微鏡頭由液氦冷卻到4K，整個移動部件需要在超低溫，真空以及強磁場作用下工作。米銥公司為該應用提供了兩支電容傳感器，成功滿足了極端
環境工作要求。
Surfaces are inspected with nanometre resolution for Atomic Force Microscopy (AFM). The test item must be able to be moved in the nanometre range for a surface
topography. attocube systems AG in Munich has developed actuator motors for such precise positioning. Using a positioning unit with piezo ceramics, movement in the x,
y and z-axes is possible. The positioning range, which is measured by the sensors, is 1.2mm x 1.2mm. The complete microscope head is cooled with liquid helium to 4K
above the absolute zero point of -273°C (corresponds to 0K). The traversing units operate at 4K ambient temperature in an ultra-high vacuum and under the highest
magnetic fields.
In order to measure the x and y movement, attocube systems AG uses two capacitive sensors from Micro-Epsilon on the nano positioning unit. With a measuring range of
1mm, the sensors have a precision of less than 5nm and operate completely without contact. The extreme ambient conditions are a particular challenge. The sensors must provide identical results at 4K as at room temperature. This is possible due to the use of special materials for the sensor and cable, which provide stable measurements due to low thermal expansion. The sensors are not influenced by extreme ambient conditions. This application can only be solved using capacitive measurement technology. No precise statements about the measurement results were possible using eddy current sensors, as the temperature gradient of the target at 4K is very low and the specific current flow characteristics change.
